Electrical and micromechanical performance of ultrasonically cleaned silicon wafers

A. Nadtochiy, A. Podolian, V. Kuryliuk, A. Kuryliuk, O. Korotchenkov, Julian Schmid, Viktor Schlosser
  • January 2010, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/miel.2010.5490485

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The following have contributed to this page: Oleg Korotchenkov