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http://dx.doi.org/10.1109/miel.2010.5490485
The following have contributed to this page: Oleg Korotchenkov
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Electrical and micromechanical performance of ultrasonically cleaned silicon wafers
A. Nadtochiy, A. Podolian, V. Kuryliuk, A. Kuryliuk, O. Korotchenkov, Julian Schmid, Viktor Schlosser- January 2010, Institute of Electrical & Electronics Engineers (IEEE)
- DOI: 10.1109/miel.2010.5490485
