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The method for the extraction of piezoresistance coefficients with the use of a flat membrane as a test structure is considered. The necessary and sufficient conditions and conditioning of the extraction problem are examined as a problem of a correct test structure. For the given condition number, the number of the error propagation of the input data is considered.
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This page is a summary of: Exact extraction of piezoresistance coefficient using flat membrane, IEEE Sensors Journal, February 2006, Institute of Electrical & Electronics Engineers (IEEE),
DOI: 10.1109/jsen.2005.855579.
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