Electrostatically Actuated Two-Dimensional Optical Scanner Having a High Resonant Frequency Ratio of Fast/Slow Axes

T. YOSHIHARA, H. NOGE, Y. HAGIHARA, K. KAWANO, H. UEDA
  • IEICE Transactions on Electronics, October 2008, Institute of Electronics, Information and Communications Engineers (IEICE)
  • DOI: 10.1093/ietele/e91-c.10.1611

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http://dx.doi.org/10.1093/ietele/e91-c.10.1611

The following have contributed to this page: Professor Hiroshi Noge