Metal positioning on silicon surfaces using the etching of buried dislocation arrays

A Bavard, F Fournel, J Eymery
  • Nanotechnology, March 2011, Institute of Physics Publishing
  • DOI: 10.1088/0957-4484/22/21/215301

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http://dx.doi.org/10.1088/0957-4484/22/21/215301

The following have contributed to this page: Dr Joel Eymery