The fabrication and application of patterned Si(001) substrates with ordered pits via nanosphere lithography

Peixuan Chen, Yongliang Fan, Zhenyang Zhong
  • Nanotechnology, February 2009, Institute of Physics Publishing
  • DOI: 10.1088/0957-4484/20/9/095303

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

The following have contributed to this page: Professor Zhenyang Zhong