Sub-micrometer-scale patterning on Zr-based metallic glass using focused ion beam irradiation and chemical etching

Noritaka Kawasegi, Noboru Morita, Shigeru Yamada, Noboru Takano, Tatsuo Oyama, Kiwamu Ashida, Sadao Momota, Jun Taniguchi, Iwao Miyamoto, Hitoshi Ofune
  • Nanotechnology, August 2007, Institute of Physics Publishing
  • DOI: 10.1088/0957-4484/18/37/375302

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http://dx.doi.org/10.1088/0957-4484/18/37/375302

The following have contributed to this page: Dr Jun Taniguchi