Large and small angle x-ray scattering studies of Si/SiGe superlattices grown by gas-source molecular beam epitaxy

J M Hartmann, J Eymery, V Calvo
  • Semiconductor Science and Technology, February 2002, Institute of Physics Publishing
  • DOI: 10.1088/0268-1242/17/3/303

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The following have contributed to this page: Dr Joel Eymery