What is it about?
Langmuir probes are standard diagnostic tools for measuring the electron energy distribution function (EEDF) in low pressure plasmas. In the manuscript, a flexible probe system is presented which combines the conventional measurement with a well-known AC modulation technique. With the AC method, a reliable and accurate determination of the EEDF low energy range is demonstrated, where classical numerical differentiation can easily lead to a severe distortion, especially in noisy environments.
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Why is it important?
Determining the EEDF is important for identifying basic plasma parameters and understanding the rates of plasma-chemical processes. It is indispensable for accurately studying plasma electron kinetcs.
Read the Original
This page is a summary of: Application of a Langmuir probe AC technique for reliable access to the low energy range of electron energy distribution functions in low pressure plasmas, Journal of Applied Physics, March 2020, American Institute of Physics,
DOI: 10.1063/1.5139601.
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