What is it about?
One can estimate and mapping of semiconductor surfaces in metal-insulator-semiconductor structures by mean of laser terahertz emission microscopy.Passivation
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Why is it important?
The passivation interface and surface defects are the most important information for semiconductor devices.
Perspectives
LTEM should belong to the family of evaluation techniques for semiconductor R&D.
Masayoshi Tonouchi
Osaka Daigaku
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This page is a summary of: Noncontact evaluation of electrical passivation of oxidized silicon using laser terahertz emission microscope and corona charging, Journal of Applied Physics, April 2019, American Institute of Physics,
DOI: 10.1063/1.5083674.
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