Grazing incidence x-ray scattering investigation of Si surface patterned with buried dislocation networks

F. Leroy, J. Eymery, D. Buttard, G. Renaud, R. Lazzari, F. Fournel
  • Applied Physics Letters, April 2003, American Institute of Physics
  • DOI: 10.1063/1.1568545

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http://dx.doi.org/10.1063/1.1568545

The following have contributed to this page: Dr Joel Eymery