Observation of latent reliability degradation in ultrathin oxides after heavy-ion irradiation

John S. Suehle, Eric M. Vogel, Peter Roitman, John F. Conley Jr., Allan H. Johnston, Bin Wang, Joseph B. Bernstein, C. E. Weintraub
  • Applied Physics Letters, February 2002, American Institute of Physics
  • DOI: 10.1063/1.1448859

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http://dx.doi.org/10.1063/1.1448859

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