Accurate control of the misorientation angles in direct wafer bonding

Frank Fournel, Hubert Moriceau, Bernard Aspar, Karine Rousseau, Joël Eymery, Jean-Luc Rouvière, Noël Magnea
  • Applied Physics Letters, February 2002, American Institute of Physics
  • DOI: 10.1063/1.1446987

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http://dx.doi.org/10.1063/1.1446987

The following have contributed to this page: Dr Joel Eymery