What is it about?
In this manuscript, we focused on the electrical characterization of the helium (He) magnetron plasma operated at average gas pressure (5 Pa) with a molybdenum (Mo) target. Optical emission spectroscopy diagnostics also supports this study by providing information on plasma evolution. The analysis of the plasma-surface interaction zone on the target unveiled the physical mechanisms associated with the high current density range (6 A.cm⁻²), corresponding to several discharge regimes. The self-sputtering yield plays a key role in HiPIMS discharge operated with helium. The electron density is highly dependent on the presence of metal.
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Why is it important?
This manuscript brings innovative pertinent in magnetron discharge with helium. The article’s presentation provides a new understanding of unconventional magnetron discharges, especially at high current densities
Perspectives
Magnetically enhanced plasmas with helium could be found in various applications. Among these, we can cite Hall-effect thrusters, plasma switches, and light gas magnetron sputtering .
Erwan Morel
COMUE Universite Paris-Saclay
Read the Original
This page is a summary of: Impact of self-sputtering in high power impulse magnetron sputtering (HiPIMS) with helium, Journal of Applied Physics, April 2023, American Institute of Physics,
DOI: 10.1063/5.0145547.
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