What is it about?

Optical emission spectroscopic measurement is a non-invasive diagnostic method for plasma. Emitted light from the plasma is reflected many times by the chamber inner wall. This phenomenon prevents accurate measurement of plasma spectral radiant energy.

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Why is it important?

First, we proposed a simple method to measure the spectral reflectance of the chamber inner wall. Second, we realized an emission spectroscopic measurement technique correcting the effects of the multiple light reflections at the inner wall and diagnosed the electron temperature and electron density.

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This page is a summary of: Radial dependence diagnosis of inductively coupled Ar plasma based upon optical emission spectroscopic measurement with spectral reflectance compensation, Review of Scientific Instruments, August 2023, American Institute of Physics, DOI: 10.1063/5.0138912.
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