OES measurement of a chamber-enclosed plasma

What is it about?

Optical emission spectroscopic measurement is a non-invasive diagnostic method for plasma. Emitted light from the plasma is reflected many times by the chamber inner wall. This phenomenon prevents accurate measurement of plasma spectral radiant energy.

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Photo by John Doyle on Unsplash

Photo by John Doyle on Unsplash

Why is it important?

First, we proposed a simple method to measure the spectral reflectance of the chamber inner wall. Second, we realized an emission spectroscopic measurement technique correcting the effects of the multiple light reflections at the inner wall and diagnosed the electron temperature and electron density.