What is it about?
Micro-structures are usually fabricated on (bigger) substrates, so they can be used as resonators. The substrate itself can also function as a resonator. When the resonance frequency of one of the micro-structures is close to the resonance frequency of the substrate, they can exchange energy. For many applications, we want the micro-structure resonator to lose energy as slowly as possible. We show that you should design your substrate such that it does not have frequencies that match to your micro-structures. Additionally, we also show that if you have more than one micro-structure on the same substrate, they can also exchange energy.
Photo by Paris Papavlasopoulos on Unsplash
Why is it important?
This work is important because micro-structures that lose energy slower can make better sensors. And, if you have more micro-structures on the same chip, you can make smaller sensors.
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This page is a summary of: Mechanical dissipation by substrate–mode coupling in SiN resonators, Applied Physics Letters, July 2022, American Institute of Physics,
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