What is it about?

Micro-structures are usually fabricated on (bigger) substrates, so they can be used as resonators. The substrate itself can also function as a resonator. When the resonance frequency of one of the micro-structures is close to the resonance frequency of the substrate, they can exchange energy. For many applications, we want the micro-structure resonator to lose energy as slowly as possible. We show that you should design your substrate such that it does not have frequencies that match to your micro-structures. Additionally, we also show that if you have more than one micro-structure on the same substrate, they can also exchange energy.

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Why is it important?

This work is important because micro-structures that lose energy slower can make better sensors. And, if you have more micro-structures on the same chip, you can make smaller sensors.


This is a systematic study into one of the effects that were suspected by people in the field, but hard to prove because the effect is difficult to track and repeat precisely. It provides clear evidence that to design a good micro-resonator (one that loses energy slowly), you should design its substrate as well.

Matthijs de Jong
Technische Universiteit Delft

Read the Original

This page is a summary of: Mechanical dissipation by substrate–mode coupling in SiN resonators, Applied Physics Letters, July 2022, American Institute of Physics,
DOI: 10.1063/5.0092894.
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