What is it about?
We have succeeded in developing an electret-type MEMS vibratory energy harvester that integrates a self-assembled electret (SAE) that does not require any charging processing in a micromechanical structure. By using the proposed technology, it will be possible to monolithically integrate electret-type MEMS energy harvesters and electronic circuits, which has been unexplored until now.
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Why is it important?
(1) Realization of an electret-type MEMS vibratory energy harvester that does not require any electret charging process. (2) The electret can be formed only by the film deposition process (evaporation) at room temperature. (3) Monolithic integration of MEMS and electronic circuits can also be possible.
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This page is a summary of: MEMS post-processed self-assembled electret for vibratory energy harvesters, Applied Physics Letters, December 2021, American Institute of Physics,
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