Study of demolding in nanoimprint lithography with pseudoplastic metal nanoparticle fluids

Weiwei Xia, Yufeng Su, Tianhao Li, Chaoran Liu, Dongxue Li, Zhiyong Duan
  • RSC Advances, January 2013, Royal Society of Chemistry
  • DOI: 10.1039/c3ra42822b

Study of Demolding

What is it about?

Through the analysis of key parameters which would affect the microstructural integrity at the initial time of demolding, analytic expressions of the forces acting on the microstructure, e.g., adhesion force, internal force, friction force and other related parameters, as well as the effects of the friction coefficient, the Hamaker constant, the aspect ratios of the patterning, and the size of the metal nanoparticles on the integrity of patterning are obtained and analyzed.

Why is it important?

In the case of the absence of bottom fracture in demolding, the analysis results have important guiding significances for the optimization of the parameters set in demolding process.

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