X-ray reflectivity of silicon on insulator wafers

J. Eymery, F. Rieutord, F. Fournel, D. Buttard, H. Moriceau
  • Materials Science in Semiconductor Processing, February 2001, Elsevier
  • DOI: 10.1016/s1369-8001(00)00158-x

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http://dx.doi.org/10.1016/s1369-8001(00)00158-x

The following have contributed to this page: Dr Joel Eymery