Ultra thin silicon films directly bonded onto silicon wafers

F Fournel, H Moriceau, N Magnea, J Eymery, J.L Rouvière, K Rousseau, B Aspar
  • Materials Science and Engineering B, April 2000, Elsevier
  • DOI: 10.1016/s0921-5107(99)00431-6

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The following have contributed to this page: Dr Joel Eymery