Utilizing of hydrocarbon contamination for prevention of the surface charge-up at electron-beam assisted chemical etching of a diamond chip

Jun Taniguchi, Iwao Miyamoto, Naoto Ohno, Satoshi Honda
  • Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, January 1997, Elsevier
  • DOI: 10.1016/s0168-583x(96)00449-1

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The following have contributed to this page: Dr Jun Taniguchi