GIXRD of nanoscale strain patterning in wafer bonding

J. Eymery, F. Leroy, F. Fournel
  • Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, January 2003, Elsevier
  • DOI: 10.1016/s0168-583x(02)01677-4

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The following have contributed to this page: Dr Joel Eymery