Nanometric patterning with ultrathin twist bonded silicon wafers

F Fournel, H Moriceau, N Magnea, J Eymery, D Buttard, J.L Rouvière, K Rousseau, B Aspar
  • Thin Solid Films, December 2000, Elsevier
  • DOI: 10.1016/s0040-6090(00)01460-7

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The following have contributed to this page: Dr Joel Eymery