Ion-beam processing of single crystal diamond using SOG mask

Jun Taniguchi, Hirohisa Ohno, Yusaku Kawabata, Iwao Miyamoto
  • Vacuum, May 2006, Elsevier
  • DOI: 10.1016/j.vacuum.2005.11.011

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http://dx.doi.org/10.1016/j.vacuum.2005.11.011

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