Dwell time adjustment for focused ion beam machining

Jun Taniguchi, Shin-ichi Satake, Takaki Oosumi, Akihisa Fukushige, Yasuo Kogo
  • Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, July 2013, Elsevier
  • DOI: 10.1016/j.nimb.2013.02.039

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http://dx.doi.org/10.1016/j.nimb.2013.02.039

The following have contributed to this page: Dr Jun Taniguchi