Computer generated hologram-ROM fabrication and duplication by EBL and UV-NIL

Keito Ogino, Noriyuki Unno, Shuhei Yoshida, Manabu Yamamoto, Jun Taniguchi
  • Microelectronic Engineering, July 2014, Elsevier
  • DOI: 10.1016/j.mee.2014.06.034

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http://dx.doi.org/10.1016/j.mee.2014.06.034

The following have contributed to this page: Dr Jun Taniguchi