Defect analysis and lifetime evaluation of a release-coated nanoimprint mold

Masanori Okada, Daisuke Yamashita, Noriyuki Unno, Jun Taniguchi
  • Microelectronic Engineering, July 2014, Elsevier
  • DOI: 10.1016/j.mee.2014.06.009

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

The following have contributed to this page: Dr Jun Taniguchi