Super resolution technique for sub-100nm nanoimprint mold via mechanical deformation method

Toru Miebori, Noriyuki Unno, Jun Taniguchi
  • Microelectronic Engineering, July 2014, Elsevier
  • DOI: 10.1016/j.mee.2014.05.022

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

http://dx.doi.org/10.1016/j.mee.2014.05.022

The following have contributed to this page: Dr Jun Taniguchi