Super-resolution technique for nanoimprint mold using elastic UV-curable resin

Noriyuki Unno, Shin-ichi Satake, Jun Taniguchi
  • Microelectronic Engineering, October 2013, Elsevier
  • DOI: 10.1016/j.mee.2013.03.044

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The following have contributed to this page: Dr Jun Taniguchi