Fabrication of self-supporting antireflection-structured film by UV–NIL

Nurhafizah Binti Abu Talip[a]Yusof, Jun Taniguchi
  • Microelectronic Engineering, October 2013, Elsevier
  • DOI: 10.1016/j.mee.2013.03.041

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http://dx.doi.org/10.1016/j.mee.2013.03.041

The following have contributed to this page: Dr Jun Taniguchi