Improving the lifespan of the cantilever during electron assisted AFM lithography

Takao Inoue, Jun Taniguchi, Toshihiko Ochi
  • Microelectronic Engineering, October 2012, Elsevier
  • DOI: 10.1016/j.mee.2012.05.019

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http://dx.doi.org/10.1016/j.mee.2012.05.019

The following have contributed to this page: Dr Jun Taniguchi