Three-dimensional measurements of UV-imprint process by micro-digital holographic-PTV

Shin-ichi Satake, Jun Taniguchi, Takahiro Kanai, Noriyuki Unno
  • Microelectronic Engineering, September 2012, Elsevier
  • DOI: 10.1016/j.mee.2012.04.010

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The following have contributed to this page: Dr Jun Taniguchi