Fabrication of roll mold using electron-beam direct writing and metal lift-off process

Hiroki Maruyama, Noriyuki Unno, Jun Taniguchi
  • Microelectronic Engineering, September 2012, Elsevier
  • DOI: 10.1016/j.mee.2012.01.012

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The following have contributed to this page: Dr Jun Taniguchi