Lifetime evaluation of release agent for ultraviolet nanoimprint lithography

Daisuke Yamashita, Jun Taniguchi, Hokuto Suzuki
  • Microelectronic Engineering, September 2012, Elsevier
  • DOI: 10.1016/j.mee.2012.01.011

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http://dx.doi.org/10.1016/j.mee.2012.01.011

The following have contributed to this page: Dr Jun Taniguchi