Degradation of release layer on high aspect ratio mold by contact angle measurement

Junki Takahashi, Jun Taniguchi
  • Microelectronic Engineering, August 2011, Elsevier
  • DOI: 10.1016/j.mee.2010.12.021

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

The following have contributed to this page: Dr Jun Taniguchi