Degradation of release layer on high aspect ratio mold by contact angle measurement

Junki Takahashi, Jun Taniguchi
  • Microelectronic Engineering, August 2011, Elsevier
  • DOI: 10.1016/j.mee.2010.12.021

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http://dx.doi.org/10.1016/j.mee.2010.12.021

The following have contributed to this page: Dr Jun Taniguchi