Evaluation of filling behavior on UV nanoimprint lithography using release coating

Kazutomo Osari, Noriyuki Unno, Jun Taniguchi, Ken-ichi Machinaga, Takeshi Ohsaki, Nobuji Sakai
  • Microelectronic Engineering, May 2010, Elsevier
  • DOI: 10.1016/j.mee.2009.11.175

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http://dx.doi.org/10.1016/j.mee.2009.11.175

The following have contributed to this page: Dr Jun Taniguchi