Two-tone metal pattern transfer technique using a single mold surface

Noriyuki Unno, Jun Taniguchi
  • Microelectronic Engineering, May 2010, Elsevier
  • DOI: 10.1016/j.mee.2009.11.102

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

The following have contributed to this page: Dr Jun Taniguchi