Analysis on microstructure of interface layer in DLC/Si structures produced by FIB–CVD

Naomichi Sakamoto, Yasuo Kogo, Takuya Yasuno, Jun Taniguchi, Iwao Miyamoto
  • Diamond and Related Materials, July 2008, Elsevier
  • DOI: 10.1016/j.diamond.2008.01.058

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The following have contributed to this page: Dr Jun Taniguchi