Analysis on microstructure of interface layer in DLC/Si structures produced by FIB–CVD

Naomichi Sakamoto, Yasuo Kogo, Takuya Yasuno, Jun Taniguchi, Iwao Miyamoto
  • Diamond and Related Materials, July 2008, Elsevier
  • DOI: 10.1016/j.diamond.2008.01.058

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

http://dx.doi.org/10.1016/j.diamond.2008.01.058

The following have contributed to this page: Dr Jun Taniguchi