XPS studies on damage evaluation of single-crystal diamond chips processed with ion beam etching and reactive ion beam assisted chemical etching

Yusaku Kawabata, Jun Taniguchi, Iwao Miyamoto
  • Diamond and Related Materials, January 2004, Elsevier
  • DOI: 10.1016/j.diamond.2003.09.005

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http://dx.doi.org/10.1016/j.diamond.2003.09.005

The following have contributed to this page: Dr Jun Taniguchi