3D imprint technology using substrate voltage change

Jun Taniguchi, Masamichi Iida, Takayuki Miyazawa, Iwao Miyamoto, Kiyoshi Shinoda
  • Applied Surface Science, November 2004, Elsevier
  • DOI: 10.1016/j.apsusc.2004.05.220

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http://dx.doi.org/10.1016/j.apsusc.2004.05.220

The following have contributed to this page: Dr Jun Taniguchi