Linear Thermal Expansion Coefficient (at Temperatures from 130 to 800 K) of Borosilicate Glasses Suitable for Silicon Compounds in Microelectronics

What is it about?

This paper presents a detailed analysis of the Coefficient of Linear Thermal Expansion (CLTE) and relative elongation of two borosilicate glasses, LK5 and Borofloat 33, using a TMA7100 thermomechanical analyzer. Measurements were conducted over a temperature range of 130 to 800 K, with relative errors not exceeding ±5% for CLTE and ±3% for thermal elongation. We provide polynomial equations to fit these measurements, which are crucial for modeling device characteristics in microsystems engineering. This data is essential for optimizing silicon bonding with glass.

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