All Stories

  1. Reducing thermal mismatch stress in anodically bonded silicon–glass wafers: theoretical estimation

    Article • Journal of Micro/Nanolithography MEMS and MOEMS, January 2017, SPIE

    Dr Leonid S Sinev

  2. Study of polycrystalline silicon obtained by aluminum-induced crystallization depending on process conditions

    Article • Materials Research Express, November 2016, Institute of Physics Publishing

    Dr Alexander Pereyaslavtsev, Dr Leonid S Sinev

  3. Linear Thermal Expansion Coefficient (at Temperatures from 130 to 800 K) of Borosilicate Glasses Suitable for Silicon Compounds in Microelectronics

    Article • Glass and Ceramics, April 2016, Springer Science + Business Media

    Dr Leonid S Sinev

  4. Mechanical Stresses Estimation in Silicon and Glass Bonded at Elevated Temperature

    Article • Science and Education of the Bauman MSTU, December 2014, Science and Education of the Bauman MSTU

    Dr Leonid S Sinev

  5. Model of Pressure Variation in a Vacuum System for Volatile Liquid Evacuation

    Article • Technical Physics, January 2005, Pleiades Publishing Ltd

    Dr Leonid S Sinev