Stress and Strain Measurement in Stressed Silicon Lines

A Béché, J L Rouvière, J C Barbé, F. Andrieu, D Rouchon, J Eymery, M Mermoux
  • Springer Science + Business Media
  • DOI: 10.1007/978-1-4020-8615-1_91

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http://dx.doi.org/10.1007/978-1-4020-8615-1_91

The following have contributed to this page: Dr Joel Eymery