What is it about?

In this paper, a novel integrated solid-state solution is proposed to replace the vacuum-based photomultiplier tube and other constituent components of the Everhart–Thornley detector, which has been widely used for secondary electron detection in scanning electron microscopy.

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Why is it important?

Compared to the conventional setup, this integrated circuit offers potential merits such as higher cost effectiveness, smaller dimensions, lower voltage and power requirements, and better circuit integration.


A novel integrated circuit for secondary electron detection in the scanning electron microscope.

Dr Joon Huang Chuah
University of Malaya

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This page is a summary of: An integrated solid-state solution for secondary electron detection, Analog Integrated Circuits and Signal Processing, November 2013, Springer Science + Business Media,
DOI: 10.1007/s10470-013-0234-4.
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