Compositional dependence of Pb(Mg 1/3 ,Nb 2/3 )O 3 –PbTiO 3 piezoelectric thin films by combinatorial sputtering

  • Fumiya Kurokawa, Yuichi Tsujiura, Hirotaka Hida, Isaku Kanno
  • Japanese Journal of Applied Physics, September 2014, Japan Society of Applied Physics
  • DOI: 10.7567/jjap.53.09pa06

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http://dx.doi.org/10.7567/jjap.53.09pa06