Formation and migration energies of a vacancy and an interstitial in a high-purity Si crystal determined by detecting complexes of point defects and hydrogen: Evaluation of activation energies of self-diffusion

  • Masashi Suezawa, Naoki Fukata, Yoshiaki Iijima, Ichiro Yonenaga
  • Japanese Journal of Applied Physics, August 2014, Japan Society of Applied Physics
  • DOI: 10.7567/jjap.53.091302

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http://dx.doi.org/10.7567/jjap.53.091302

The following have contributed to this page: Ichiro YONENAGA