Formation of hydrogenated diamond-like carbon films by reactive Ar/CH 4 high-power impulse magnetron sputtering

  • Takashi Kimura, Ryotaro Nishimura
  • Japanese Journal of Applied Physics, July 2014, Japan Society of Applied Physics
  • DOI: 10.7567/jjap.53.090301

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http://dx.doi.org/10.7567/jjap.53.090301