Towards a better understanding of the electrical contact formation process of the metal contact for DC MEMS/NEMS switches with statistical means

  • Haodong Qiu, Hong Wang, Feixiang Ke
  • Japanese Journal of Applied Physics, July 2014, Japan Society of Applied Physics
  • DOI: 10.7567/jjap.53.087201

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http://dx.doi.org/10.7567/jjap.53.087201