Development of EUV mask inspection system using high-order harmonic generation with a femtosecond laser

  • Hiroo Kinoshita, Tetsuo Harada, Yutaka Nagata, Takeo Watanabe, Katsumi Midorikawa
  • Japanese Journal of Applied Physics, July 2014, Japan Society of Applied Physics
  • DOI: 10.7567/jjap.53.086701

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http://dx.doi.org/10.7567/jjap.53.086701