Simulation of ion energy and angular distribution functions using Monte Carlo method coupled with multidimensional radio frequency sheath model developed utilizing COMSOL Multiphysics

  • Kazuki Denpoh
  • Japanese Journal of Applied Physics, July 2014, Japan Society of Applied Physics
  • DOI: 10.7567/jjap.53.080304

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http://dx.doi.org/10.7567/jjap.53.080304