Investigation of pseudo lateral field excited acoustic wave gas sensors with finite element method

Yung-Yu Chen, Yen-Ting Lai, Chao-Hung Hsu
  • Japanese Journal of Applied Physics, June 2014, Japan Society of Applied Physics
  • DOI: 10.7567/jjap.53.07kd01

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http://dx.doi.org/10.7567/jjap.53.07kd01